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Using patent pending technology, Lighthouse Worldwide
Solutions has created the industry’s smallest 1.0 CFM
sequencing particle counting manifold system. When
connected to a Lighthouse SOLAIR 1.0 CFM particle counter,
the 1.0 CFM MiniManifold™ is the best-in-class solution for
tool monitoring and qualification, mini-environment monitoring
and even cart-based portable monitoring systems.
The 1.0 CFM MiniManifold™ allows a single particle
counter to monitor up to 6 locations in a process tool or minienvironment
at 1.0 CFM. The 1.0 CFM MiniManifold™ consists of a manifold sequencing system with a built-in
controller and an optional blower for purge flow. The controller
communicates with the particle counter and can interface to
a computer system or process tool via the RS-485 MODBUS
communications protocol.
The external blower can be installed at a distance from the
manifold, adding flexibility to its installation. Programming
sequences for the 1.0 CFM MiniManifold™ are user-defined
for such functions as port sequence, purge duration, sample
duration and hold time. Up to 200 data records, which include
environmental data, can be stored in its built-in buffer.
Designed and built by Lighthouse Worldwide Solutions, a
name you can trust.
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[ Virtual Demo ] |
