| TECHNICAL DOCUMENTS |
Cleanroom Requirements, Certification and Monitoring Per Common
Accepted Standards
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| Cleanroom Classification and class limits are established in ISO 14644-1 (see Table 1), while specifications for testing and monitoring to prove continued compliance are established in ISO 14644-2 (see Tables 2 and 3). Often there is confusion regarding the definitions of certification and monitoring. This article explains the differences between monitoring and certification. |
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| Continuous Particle Monitoring Download PDF File |
| In order to determine the best system for continuous monitoring of particles in a cleanroom, you should understand the two types of continuous particle monitoring systems. Real time particle monitoring involves the use of a single particle counter or particle sensor at a specific location. This sensor is dedicated to monitor particles only at this specific location. Every event would be detected and counted. There are no gaps in the particle counting data. Particles are monitored in particles per cubic foot or particles per cubic meter. This system is best used at critical locations where events can happen at any time. Critical or very sensitive operations can be monitored. |
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| How to Select a Particle Counter for my Cleanroom Download PDF File |
| Often, the selection of a particle counter for use in a cleanroom is done based upon the specifications of the instrument and the purchase price. Before getting into the details of the specifications, it is important to look at how the instrument will be used, the environments in which it will be used and who will be using the instrument. Without this information taken into consideration, a less than optimal choice of particle counter for the application could be made. |
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| Real Time Process Monitoring Download PDF File |
| A common approach to controlling contamination in high technology manufacturing cleanrooms is the continuous monitoring of particles. Either dedicated, discrete, “real-time” particle counters or a multi-port pneumatic manifold system to sample multiple locations throughout the cleanroom can be used to accomplish this goal. |
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| Multi-point Monitoring in Minienvironments Download PDF File |
| Minienvironments and isolation technology have become commonplace in semiconductor and other high technology manufacturing industries. The use of minienvironments and the associated automation allows for greater levels of control as well as improved process cleanliness. |
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| Surface Particle Counting Download PDF File |
| Measuring the cleanliness of surfaces in a cleanroom is an important part of any contamination control program. It allows contamination control personnel to qualify the effectiveness of cleaning procedures for parts, work surfaces, part handling components, transport equipment, incoming materials and new tools. One common piece of equipment used to measure surface cleanliness is a surface scanner particle counter, a large, specialized device that uses a laser to scan the surface under test for particles. These machines are used in the semiconductor, disk drive and flat panel display industries to detect yield-damaging particles directly on the surface of the product. |
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