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New 50 Nanometer Liquid Particle Counter for Ultrapure Processes

 

FMS3 Facility Monitoring SoftwareLighthouse Worldwide Solutions will introduce its newest particle counter, the NanoCount 50.

The NanoCount 50, the latest innovation from Lighthouse Worldwide Solutions, is an ultra small footprint liquid particle counter with a sensitivity 50 nanometers.  The unit measures just 9” x 6” x 9” and includes the sensor, counting electronics and flow meter all housed in a NEMA rated enclosure.  The small footprint permits the instrument to be easily integrated into process equipment for point-of-use semiconductor process applications.

As our customers move to smaller line widths they are requiring nanometer particle detection capability as part of their process control strategy.” says Scott Salton, President of Lighthouse Worldwide Solutions “The NanoCount 50 was developed in direct response to customer requests for increased sensitivity in our particle counting instruments.”

Bill Shade, Vice President of Engineering and Marketing states “This technology is the result of several years of intensive research and development.  The net result is we have achieved extremely high sensitivities in a very small package.

 
     
 
Features Benefits Applications
  • Channel Sizes 50nm, 100nm, 150nm, 200nm
  • Four Channels of Simultaneous Count Data
  • 100 ml per Minute Flow Rate
  • 5.0 ml/min Sample Rate
  • 20 counts/Liter Zero Count Rate
  • Interfaces with Existing Building Automation and Factory Management Systems
  • 316L Stainless Steel Construction
  • Industry Standard RS-485 / MODBUS / 4-20mA
  • NEMA Enclosure
  • Integrated Manual Flow Control
  • 2 Year Warranty
  • Cost Effective Price per Point
  • Easy System Integration
  • International Sales and Service Support
  • Low Cost of Ownership
  • Deionized Water Monitoring
  • Process Qualification and Monitoring
 
Specifications
Size Range: 50 - 200nm
Channel Sizes: Standard: 50nm, 100nm, 150nm, 200nm
Sample Rate: 5.0 ml/min
Flow Rate: 100 ml/min
Zero Count Level: < 20 counts/Liter
Laser Source: Laser Diode
Calibration: NIST Traceable
Communication Modes: RS-232 via RJ45 to PC, RS-485; 4-20mA
LED Indicators: Power, Service, Sampling
Concentration Limit: 200,000 counts/ml @ 5% Coincidence Error
Enclosure: Stainless Steel
Sample Inlet/Outlet Connection: 1/4” Flaretek™
Sample Temperature: 32 - 302°F (0 – 150 °C)
Sample Pressure: 150 PSI
Wetted Surface Materials: Quartz, PTFE, PFA, Polycarbonate, Viton
Communication Protocol: RS-485 MODBUS; 4-20mA
Power: 24VDC
Dimensions: 9.00” (w) x 6.00” (h) x 9.00” (d) [22.86 x 15.24 x 22.86 cm]
Weight: 8 lbs (3.7 kg)
Environmental Conditions
Operating: 50°F to 104°F (10°C to 40°C) / 20% to 95% non-condensing
Storage: 14°F to 122°F (-10°C to 50°C) / Up to 98% non-condensing
Accessories
Included: Operating Manual on CD, Connection Tubing
Optional: Printed Operating Manual, Tubing
 
 
 

NanoCount 50 Datasheets
Letter Size - Hi Res: 203 KB

 
     
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