PARTICLE DEPOSITION AND PRODUCT CLEANLINESS

Surface Particle Measurements

A cleanroom is classified as controlled on air cleanliness in terms of the concentration of airborne particles.  In a cleanroom large quantities of clean air are used to remove airborne particles.  The result leads to certain air cleanliness (Air cleanliness by particle concentration, ISO 14644-1:2015).  This air cleanliness is used to classify a cleanroom.  The classification is based on the number of particles larger or equal to >= 0.1 µm per m3

The ISO 14644-9 document describes the classification of particle contamination levels on solid surfaces in cleanrooms and associated controlled environment applications.