MULTI-POINT SAMPLING FOR AMC MONITORING

Monitoring for any type of contamination is an important aspect of contamination control. Monitoring specifically for AMC is important in industries where AMC can directly affect the product or process. Airborne Molecular Contamination (AMC) is chemical contamination in the form of vapors or aerosols that have a detrimental effect on a product or a process. These chemicals may be organic or inorganic in nature and include acids, bases, polymer additives, organometallic compounds and dopants. The main sources of AMC are building and cleanroom construction materials, general environment, process chemicals and operating personnel.